The Filmetrics F20-UV is used to measure the thickness and optical constants (n and k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the specified thickness range. Commonly measured films include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings such as hardness and anti-reflection coatings, flat panel display films such as polyimides, resist, and cell gaps, and the various coatings used in CD and DVD manufacture.
- Wavelength range: 190 to 1100 nm
- Thickness range (film stack dependent): 1 nm to 40 µm
- Thickness range (when measuring n and k): 50 nm and up
- Accuracy: the greater of 0.4% or 2 nm
- Precision: 0.1 nm
- Stability: 0.07 nm