Features of SEM
- Secondary and Backscatter Electron Imaging Detectors
- Accelerating Voltages: 1kV to 30kV
- 5nm (SE) / 8nm (BSE) resolution
- “Live” Magnification Up to 150,000x
- 5 Axis (XYZTR) Motorized Stage
- -45° to 90° tilt and 360° rotation
- Navigation Camera with Tilt Assist
- 90 second pump down, 15 seconds to vent chamber
- Stage travel: ±20mm x ±20mm x 40mm (XYZ)
- Maximum Sample Size (full coverage): 80x80x35mm
Features of Ion Sputter Coater
- Use for non-conductive samples to allow imaging without electron charge effects
- Target Materials: Au